Ultrasonic assisted etch using corrosive liquids
US7377991B2 · kind B2 · utility
3Cited by
65References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 27, 2006 |
| Grant date | May 27, 2008 |
| Priority date | — |
| Expiry date | Jun 27, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67057
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An ultrasonic etching apparatus for chemically-etching a workpiece is disclosed. The apparatus includes an outer tank at least partially filled with an aqueous solution, an inner tank at least partially disposed within the outer tank and in contact with aqueous solution, the inner tank at least partially filled with an etching solution, a lid engaged with the mouth of said inner tank; and an ultrasonic transducer coupled to the outer tank to impart ultrasonic energy to the etching solution in said inner tank. Also disclosed are methods of using the apparatus to etch workpieces.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.