Irradiation device for testing objects coated with light-sensitive paint

US7378666B2 · kind B2 · utility

Assignees

• Qimonda AG · DE
• AIXUV GmbH · DE

Inventors

• Wolf-Dieter Domke · Höchstadt an der Aisch, DE
• Larissa Juschkin · Bochum, DE
• Karl Kragler · Erlangen, DE
• Rainer Lebert · Kelmis, BE
• Manfred Meisen · Aachen, DE

Key dates

• Filing date: Oct 8, 2003
• Grant date: May 27, 2008
• Expiry date: Sep 23, 2024

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J1/429
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention concerns an irradiation device for testing objects coated with light-sensitive paint, comprising a EUV radiation source, an optical system for filtering the radiation of the EUV radiation source a chamber for receiving the object, as well as systems for intersecting the trajectory of the rays on the object. The invention also concerns a method for operating such a device. The invention aims at obtaining as quickly as possible an illumination at least partly simultaneous of several irradiation fields, with different doses, by using an inexpensive laboratory radiation source without resorting to complex optical systems. Therefor, the invention provides a device comprising a simplified and compact optical system, with closable diaphragm apertures located in front of the object to be irradiated and at least one control sensor placed on the trajectory of the rays and enabling the radiation dose to be measured.