Patent assignee · DE · COMPANY

AIXUV GmbH

3Patents
0Active
3Granted
26Portfolio score

Filing activity: Apr 11, 2002 → Oct 8, 2003

Most-cited patents

PatentTitleAreaCited byStatus
US7619232B2 Method and device for producing extreme ultraviolet radiation or soft X-ray radiation Electricity 16 Expired
US7378666B2 Irradiation device for testing objects coated with light-sensitive paint Physics 1 Expired
US6856395B2 Reflectometer arrangement and method for determining the reflectance of selected measurement locations of measurement objects reflecting in a spectrally dependent manner Physics 1 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.