System for acquiring device parameters

US7382149B2 · kind B2 · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Darren L. Anand · South Burlington, US
• Nazmul Habib · South Burlington, US
• Robert McMahon · South Burlington, US
• Troy J. Perry · Saint Albans, US

Key dates

• Filing date: Jul 24, 2006
• Grant date: Jun 3, 2008
• Expiry date: Jan 16, 2027

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/31724
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A system for performing device-specific testing and acquiring parametric data on custom integrated circuits, for example ASICs, such that each chip is tested individually without excessive test time requirements, additional silicon, or special test equipment. The testing system includes a device test structure integrated into unused backfill space in an ASIC design which tests a set of dummy devices that are identical to some of those of the ASIC. The device test structure includes control logic for designating the type of test and which device types to activate (e.g. pFETs or nFETs), a protection circuit for protecting the SPM when the test is inactive, an isolation circuit for isolating the devices under test (DUT) from any leakage current during test, and a decode circuit for providing test input (e.g. voltages) to the DUT. By controlling which devices to test and the voltage conditions of those devices, the system calculates the relative product yield and health of the line on a die by die basis.