Heating/cooling method, manufacturing method of image displaying apparatus, heating/cooling apparatus, and heating/cooling processing apparatus
US7383875B2 · kind B2 · utility
5Cited by
7References
9Claims
0Family size
Assignee
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Key dates
| Filing date | Jul 8, 2004 |
| Grant date | Jun 10, 2008 |
| Priority date | — |
| Expiry date | Dec 2, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2211/36
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
A heating/cooling method, a manufacturing method of an image displaying apparatus, a heating/cooling apparatus, and a heating/cooling processing apparatus, in which the heating and cooling of a substrate can be executed at a high speed are provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.