Apparatus and methods for pumping high viscosity fluids
US7383967B2 · kind B2 · utility
34Cited by
75References
22Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 14, 2005 |
| Grant date | Jun 10, 2008 |
| Priority date | — |
| Expiry date | Nov 14, 2025 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF05C2225/04
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A system for dispensing and filtering fluid is disclosed, in which the fluid flow path is substantially vertical from the fluid inlet through fluid dispense. Substantially all wetted surfaces are Teflon® or some similar non-contaminating fluid, for applications such as cleanroom processes. A valve and a filter chamber are incorporated into a pump head to simplify the flow path and reduce potential contamination points. Preferred methods, and chips or other microelectronic devices fabricated from the apparatus or methods, are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.