Micro-electro-mechanical system (MEMS) capacitors, inductors, and related systems and methods
US7385800B2 · kind B2 · utility
7Cited by
15References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 9, 2005 |
| Grant date | Jun 10, 2008 |
| Priority date | — |
| Expiry date | Dec 9, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D1/68
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
According to one aspect, the subject matter described herein includes a MEMS fixed capacitor and a method for fabricating the MEMS fixed capacitor. The MEMS fixed capacitor can include a first stationary, capacitive plate on a substrate. Further, the MEMS fixed capacitor can include a non-conductive, stationary beam suspended above the substrate. The MEMS fixed capacitor can also include a second stationary, capacitive plate spaced a predetermined distance from the first stationary, capacitive plate for producing a predetermined capacitance between the capacitive plates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.