Capacitive type humidity sensor
US7387024B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 22, 2005 |
| Grant date | Jun 17, 2008 |
| Priority date | — |
| Expiry date | Jul 16, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/223
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive type humidity sensor includes: a semiconductor substrate; a plurality of humidity devices having a capacitance variable in accordance with a humidity; a standard capacitance device having a standard capacitance, a capacitance change of which in accordance with the humidity is smaller than that of the capacitance of each humidity device; and a CV converter circuit for converting a capacitance difference between the capacitance of each humidity device and the standard capacitance of the standard capacitance device to a signal voltage. The humidity devices, the standard capacitance device and the CV converter circuit are disposed on one side of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.