Reducing nitrogen concentration with in-situ steam generation
US7387972B2 · kind B2 · utility
3Cited by
8References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 1, 2006 |
| Grant date | Jun 17, 2008 |
| Priority date | — |
| Expiry date | Mar 1, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D30/681
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In-situ steam generation (ISSG) is used to reduce the nitrogen concentration in silicon and silicon oxide areas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.