Method and system for real time uniformity feedback
US7388647B2 · kind B2 · utility
1Cited by
5References
30Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 6, 2005 |
| Grant date | Jun 17, 2008 |
| Priority date | — |
| Expiry date | Sep 29, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70133
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Provided are a method and system for projecting an illumination beam to an image plane. The method includes producing a sample of the illumination beam and projecting the sample to a secondary image plane. Next, an illumination uniformity profile associated with the projected sample is measured while the received illumination beam is being projected to the image plane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.