Mask management method and bar code reading apparatus thereof
US7389930B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 9, 2005 |
| Grant date | Jun 24, 2008 |
| Priority date | — |
| Expiry date | Aug 11, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67294
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A mask management and bar code reading apparatus thereof are disclosed. The mask management method comprises providing a bar code reading apparatus, scanning a mask bar code on the mask by the bar code reading apparatus, transferring scanned information to a mask management system, producing a box bar code, moving the mask to a mask pod from a mask protective case, sticking the box bar code on the mask pod, inputting the data recorded in the box bar code into an exposure equipment, and exposing the mask by the exposure equipment. The bar code reading apparatus includes at least a clamping element to clamp the mask protective case, at least a reading head disposed on the clamping element to read a mask bar code, and a first light source providing a first light to irradiate the mask protective case to increase reading accuracy of the reading head.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.