Patent · US Active

Method and system for wavelength-dependent imaging and detection using a hybrid filter

US7391008B2 · kind B2 · utility

8Cited by

5References

24Claims

0Family size

Assignee

Micron Technology, Inc. · US

Inventors

Julie E. Fouquet · Portola Valley, US
Rene Helbing · Palo Alto, US

Key dates

Filing date	Apr 3, 2007
Grant date	Jun 24, 2008
Priority date	—
Expiry date	Apr 3, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG01J2003/1213
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Apparatus and methods for wavelength-dependent detection are provided. A detector includes a hybrid filter having unpatterned and patterned filter layers and at least one light-detecting sensor that detects light in first and second wavelength bands from the patterned filter layer of the hybrid filter. The unpatterned filter layer passes light in two nonoverlapping wavelength bands relative to light in wavelength bands between or among the nonoverlapping wavelength bands. The patterned filter layer includes first and second regions configured respectively to pass light in the first and second wavelength bands of the nonoverlapping wavelength bands passed by the unpatterned filter layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.