Immersion liquids with siloxane polymer for immersion lithography
US7391501B2 · kind B2 · utility
1Cited by
1References
13Claims
0Family size
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Key dates
| Filing date | Jan 22, 2004 |
| Grant date | Jun 24, 2008 |
| Priority date | — |
| Expiry date | Jul 9, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70341
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Compositions for immersion liquid materials and associated immersion lithography systems and techniques. Examples of polymer or oligomer-based immersion liquids are described to exhibit superior material properties for immersion lithography in comparison with water and some other commonly-used immersion liquids. In addition, certain material additives may be added to water and water-based immersion liquids to improve the performance of the immersion liquids in immersion lithography.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.