Method of calibrating zero offset of a pressure sensor
US7392687B2 · kind B2 · utility
11Cited by
8References
10Claims
0Family size
Assignee
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Key dates
| Filing date | Sep 13, 2005 |
| Grant date | Jul 1, 2008 |
| Priority date | — |
| Expiry date | Feb 1, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49004
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A piezoresistive pressure sensor test sample is first provided, and a zero offset of the piezoresistive pressure sensor test sample is measured. Subsequently, a stress deviation corresponding to the zero offset is calculated. Thereafter, at least a piezoresistive pressure sensor under the same process condition as the piezoresistive pressure sensor test sample is formed. When forming the piezoresistive pressure sensor, at least a stress-adjusting thin film is formed on at least a surface of the piezoresistive pressure sensor to calibrate the zero offset of the piezoresistive pressure sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.