Method of generating image and illumination device for inspecting substrate
US7394084B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 20, 2005 |
| Grant date | Jul 1, 2008 |
| Priority date | — |
| Expiry date | Jun 20, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/309
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
For generating an image for inspection of a substrate, a camera is provided above this substrate with an optical axis orienting downward and a plurality of multi-colored light emitting members are set around the optical axis of the camera so as to be within a specified angular range with respect to a target area on the substrate. The camera is operated to generate an image of the target area for inspection while switched-on conditions of these light emitting members are being controlled such that the colors and angles of light illuminating this target area are varied according to a specified kind of the purpose of this inspection.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.