Method of measuring a surface voltage of an insulating layer
US7394279B2 · kind B2 · utility
2Cited by
3References
15Claims
0Family size
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Key dates
| Filing date | Jul 31, 2006 |
| Grant date | Jul 1, 2008 |
| Priority date | — |
| Expiry date | Dec 24, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2656
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In a method of measuring a surface voltage of an insulating layer, the number of times that surface voltages are measured in a depletion region increases so that precise data about the depletion region may be obtained. The number of times that the surface voltages are measured in an accumulation region and an inversion region decreases so that the data about the depletion region may be rapidly obtained.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.