Micro sample heating apparatus and method of making the same
US7395706B2 · kind B2 · utility
2Cited by
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16Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 23, 2006 |
| Grant date | Jul 8, 2008 |
| Priority date | — |
| Expiry date | Jul 26, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N25/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micro sample heating apparatus has a substrate, a micro heating device disposed on a first surface of the substrate, a cavity having an inclined sidewall and corresponding to the micro heating device positioned in a second surface of the substrate, and an isolation structure positioned on the second surface of the substrate. The isolation structure has an opening corresponding to the cavity, and the cavity and the opening form a sample room.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.