Apparatus for manufacturing single crystal
US7396411B2 · kind B2 · utility
3Cited by
11References
14Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Mar 21, 2006 |
| Grant date | Jul 8, 2008 |
| Priority date | — |
| Expiry date | Mar 21, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T117/1096
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for manufacturing a single crystal includes the steps of: flowing a raw material gas toward a seed crystal in a reactive chamber so that the single crystal grows from the seed crystal; controlling the raw material gas by a gas flow control member having a cylindrical shape; passing the raw material gas through a clearance between the seed crystal and an inner wall of the gas flow control member; and flowing a part of the raw material gas to bypass the seed crystal. The method provides the single crystal having good quality.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.