FEOL/MEOL metal resistor for high end CMOS
US7397087B2 · kind B2 · utility
22Cited by
9References
8Claims
0Family size
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Key dates
| Filing date | Aug 6, 2004 |
| Grant date | Jul 8, 2008 |
| Priority date | — |
| Expiry date | Jun 6, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D30/601
Abstract
A FEOL/MEOL metal resistor that has tight sheet resistance tolerance (on the order of about 5% or less), high current density (on the order of about 0.5 mA/micron or greater), lower parasitics than diffused resistors and lower TCR than standard BEOL metal resistors as well as various methods of integrating such a metal resistor structure into a CMOS technology are provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.