Patent · US Expired

Gas discharge lamp for extreme UV radiation

US7397190B2 · kind B2 · utility

2Cited by

2References

13Claims

0Family size

Assignee

KONINKLIJKE PHILIPS ELECTRONICS NV · NL

Inventors

Guenther Hans Derra · Aachen, DE
Joseph Pankert · Aachen, DE
Willi Neff · Kelmis, BE
Klaus Bergmann · Heilbronn, DE
Jeroen Jonkers · Seevetal, DE

Key dates

Filing date	Nov 28, 2003
Grant date	Jul 8, 2008
Priority date	—
Expiry date	Nov 26, 2024

Classification

Technology area (CPC H)Electricity
CPC primaryH01J61/09
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

The invention relates to a gas discharge lamp for EUV radiation with an anode (1) and a hollow cathode (2), wherein the hollow cathode (2) has at least two openings (3, 3′) and the anode (1) has a through hole (4), which is characterized in that the longitudinal axes (5, 5′) of the hollow cathode openings (3) have a common point of intersection S lying on the axis of symmetry (6) of the anode opening (4).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.