Patent · US Expired

Surface scanning

US7397553B1 · kind B1 · utility

9Cited by
74References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 24, 2005
Grant dateJul 8, 2008
Priority date
Expiry dateJan 4, 2026

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N21/9501
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

In one embodiment, a surface scanning system comprises a radiation directing assembly that scans a surface using a Cartesian scanning pattern; and a radiation collecting assembly that collects radiation reflected from the surface. A scattered radiation collection system is included that measures the scattered light from the surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.