Surface scanning
US7397553B1 · kind B1 · utility
9Cited by
74References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 24, 2005 |
| Grant date | Jul 8, 2008 |
| Priority date | — |
| Expiry date | Jan 4, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/9501
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In one embodiment, a surface scanning system comprises a radiation directing assembly that scans a surface using a Cartesian scanning pattern; and a radiation collecting assembly that collects radiation reflected from the surface. A scattered radiation collection system is included that measures the scattered light from the surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.