Apparatus and method for examining a disk-shaped sample on an X-Y-theta stage
US7397554B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 4, 2006 |
| Grant date | Jul 8, 2008 |
| Priority date | — |
| Expiry date | Oct 31, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/9501
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method for examining features of a planar, disk-shaped samples on a stage that holdings the sample and has an X-drive, a Y-drive and a θ-drive for rotating the stage about a center of rotation defined in the stage coordinates. The sample is placed on the stage such that the center of the sample is substantially aligned with the center of rotation and a measurement assembly is located above the sample to examine the features optically. A scheduling module coordinates the X-drive, the Y-drive and the θ-drive with the measurement assembly such that the sample is examined in an even number n of angular sectors defined by a sector angle Θ that is the same for each sector. Specifically, the sector angle Θ is defined in terms of n as follows:where n=4m and m is an integer, such that a multiple of sector angle Θ always includes angles 90° and 180°.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.