Guoguang Li
26Patents
9h-index
32Co-inventors
75Inventor score
Filing activity: Jun 18, 1999 → Mar 26, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6982793B1 | Method and apparatus for using an alignment target with designed in offset | Electricity | 102 | Expired |
| US6392756B1 | Method and apparatus for optically determining physical parameters of thin films deposited on a complex substrate | Physics | 53 | Expired |
| US6091485A | Method and apparatus for optically determining physical parameters of underlayers | Physics | 49 | Expired |
| US6327035A | Method and apparatus for optically examining miniature patterns | Physics | 29 | Expired |
| US7391524B1 | System and method for efficient characterization of diffracting structures with incident plane parallel to grating lines | Physics | 19 | Expired |
| US7289214B1 | System and method for measuring overlay alignment using diffraction gratings | Physics | 14 | Expired |
| US7525672B1 | Efficient characterization of symmetrically illuminated symmetric 2-D gratings | Physics | 14 | Expired |
| US6379014B1 | Graded anti-reflective coatings for photolithography | Emerging Cross-Sectional Technologies | 10 | Expired |
| US7349103B1 | System and method for high intensity small spot optical metrology | Physics | 9 | Active |
| US7755775B1 | Broadband optical metrology with reduced wave front distortion, chromatic dispersion compensation and monitoring | Physics | 9 | Active |
| US6580515B1 | Surface profiling using a differential interferometer | Physics | 8 | Expired |
| US8767209B2 | Broadband polarization spectrometer with inclined incidence and optical measurement system | Physics | 7 | Active |
| US9170156B2 | Normal-incidence broadband spectroscopic polarimeter containing reference beam and optical measurement system | Physics | 4 | Active |
| US8125641B2 | Method and apparatus for phase-compensated sensitivity-enhanced spectroscopy (PCSES) | Physics | 4 | Active |
| US7999936B1 | Combined transmittance and angle selective scattering measurement of fluid suspended particles for simultaneous determination of refractive index, extinction coefficient, particle size and particle density | Physics | 3 | Active |
| US7212293B1 | Optical determination of pattern feature parameters using a scalar model having effective optical properties | Physics | 2 | Expired |
| US6891628B2 | Method and apparatus for examining features on semi-transparent and transparent substrates | Physics | 2 | Expired |
| US7756677B1 | Implementation of rigorous coupled wave analysis having improved efficiency for characterization | Physics | 2 | Active |
| US7397554B1 | Apparatus and method for examining a disk-shaped sample on an X-Y-theta stage | Physics | 2 | Active |
| US7253909B1 | Phase shift measurement using transmittance spectra | Physics | 1 | Expired |
| US11656034B2 | Positive-pressure-withstanding high-power flat evaporator, processing methods thereof and flat loop heat pipe based on evaporator | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US11168945B2 | Preparation method of loop heat pipe evaporator | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US9176048B2 | Normal incidence broadband spectroscopic polarimeter and optical measurement system | Physics | 0 | Active |
| US11568876B2 | Method and device for user registration, and electronic device | Physics | 0 | Active |
| US7505147B1 | Efficient calculation of grating matrix elements for 2-D diffraction | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.