Interferometer and shape measuring method
US7397570B2 · kind B2 · utility
9Cited by
1References
18Claims
0Family size
Assignee
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Key dates
| Filing date | May 15, 2006 |
| Grant date | Jul 8, 2008 |
| Priority date | — |
| Expiry date | Aug 10, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A wavelength-variable light source is configured to emit a light with a wavelength (λ), which is variable within a scan width (Δλ). An interferometer has a coherent length (ΔL), which is determinable from (Δλ) and (λ). A controller determines an appropriate magnitude of the scan width (Δλ) while a CCD camera captures a fringe image in an exposure time (Te), which is set longer than a time for wavelength scanning.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.