Integrated circuit inductor with integrated vias
US7400025B2 · kind B2 · utility
21Cited by
19References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 11, 2004 |
| Grant date | Jul 15, 2008 |
| Priority date | — |
| Expiry date | May 11, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Integrated circuit inductors (5) are formed by interconnecting various metal layers (10) in an integrated circuit with continuous vias (200). Using continuous vias (200) improves the Q factor over existing methods for high frequency applications. The contiguous length of the continuous vias should be greater than three percent of the length of the inductor (5).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.