Patent · US Expired

Apparatus for handling of a disklike member, especially for handling of a wafer

US7400392B2 · kind B2 · utility

6Cited by

4References

12Claims

0Family size

Assignee

Integrated Dynamics Engineering GmbH · DE

Inventor

Ralf Tillmann · Mannheim, DE

Key dates

Filing date	Mar 30, 2005
Grant date	Jul 15, 2008
Priority date	—
Expiry date	Aug 15, 2025

Classification

Technology area (CPC G)Physics
CPC primaryG01N21/9506
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

There is provided an apparatus for handling a disklike member having a surface, especially for handling of a wafer, including a robot for carrying out at least an angular motion in a defined moving plane, an end-effector for holding the disklike member, and a wrist member operatively interconnecting said robot with said end-effector. The wrist member provides at least a motion of the end-effector about an axis in a plane of the surface of the disklike member. An inclining motion of said disklike member is achieved by combining the angular motion of the robot and the motion about the axis in the plane of the surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.