Electrostatic chuck
US7403386B2 · kind B2 · utility
3Cited by
11References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 8, 2006 |
| Grant date | Jul 22, 2008 |
| Priority date | — |
| Expiry date | Sep 9, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6831
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An electrostatic chuck includes; a base made of ceramics, in which an electrode generating electrostatic attractive force is embedded; a cooling member which contains metal; a bonding material which bonds the base and the cooling member to each other; a gas providing passage which penetrates the base, the bonding material, and the cooling member; and an engagement member and a bolt member, which are fixing members mechanically fixing the base and the cooling member to each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.