Automated test and characterization data analysis methods and arrangement
US7404123B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 3, 2006 |
| Grant date | Jul 22, 2008 |
| Priority date | — |
| Expiry date | Jan 11, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/2602
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method for testing a component configured to be installed in a plasma processing system. The method includes providing an ATAC (Automated Test and Characterization) fixture, which includes a system control software package ( SCS) that is representative of production system control software, a data manager module configured to obtain specification data from a database over a computer network, a test manager module configured to execute a set of tests designed to test the component, a SCS interface engine configured to provide the set of tests to the SCS, and a data analysis module configured to provide computer-implemented data analysis tool for analyzing test data obtained from the testing the component. The method also includes coupling the ATAC fixture to the component to enable the SCS in the ATAC fixture to test the component utilizing the set of tests and at least a portion of the specification data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.