Amorphous soft magnetic shielding and keeper for MRAM devices
US7405085B2 · kind B2 · utility
4Cited by
2References
8Claims
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Key dates
| Filing date | Sep 15, 2004 |
| Grant date | Jul 29, 2008 |
| Priority date | — |
| Expiry date | Jan 20, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N50/10
Abstract
An amorphous soft magnetic thin film material for forming shielding and keeper applications in MRAM devices. The amorphous soft magnetic material may be deposited using Physical Vapor Deposition (PVD) in the presence of a magnetic field, in order to form shielding layers and keepers in a multi-layer metallization process. The soft magnetic material may be an amorphous metallic alloy, such as CoZrX, where X may be Ta, Nb, Pd and/or Rh.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.