Image forming state adjusting system, exposure method and exposure apparatus, and program and information storage medium
US7405803B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 17, 2007 |
| Grant date | Jul 29, 2008 |
| Priority date | — |
| Expiry date | Apr 17, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/706
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A second communications server obtains adjustment information of an adjustment unit in an exposure apparatus and information related to image forming quality (such as wavefront aberration) of a projection optical system under an exposure condition that serves as a reference, via a first communications server, and then calculates an optimal adjustment amount of the adjustment unit under a target exposure condition based on the information. In addition, the second communications server obtains adjustment information of the adjustment and actual measurement data of image forming quality of the projection optical system via the first communications server, and then calculates the optimal adjustment amount of the adjustment unit under the target exposure condition based on the information. And, the second communications server controls the adjustment unit in the exposure apparatus via the first communications server, based on the calculations results.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.