X-ray microscope with microfocus source and Wolter condenser
US7406151B1 · kind B1 · utility
50Cited by
15References
14Claims
0Family size
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Key dates
| Filing date | Sep 21, 2006 |
| Grant date | Jul 29, 2008 |
| Priority date | — |
| Expiry date | Nov 25, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K1/06
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
An x-ray microscope uses a microfocus x-ray source with a focus spot of less than 10 micrometers and a Wolter condenser having a magnification of about four or more for concentrating x-rays from the source onto a sample. A detector is provided for detecting the x-rays after interaction with the sample, and an x-ray objective is used to form an image of the sample on the detector. The use of the Wolter optic addresses a problem with microfocus sources that arise when the size of the focal spot that must then be imaged onto the sample with the condenser is smaller than the field of view.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.