Atomic force microscopy scanning and image processing
US7406860B2 · kind B2 · utility
16Cited by
8References
20Claims
0Family size
Assignee
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Key dates
| Filing date | Apr 28, 2006 |
| Grant date | Aug 5, 2008 |
| Priority date | — |
| Expiry date | Apr 28, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q30/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A topographic profile of a structure is generated using atomic force microscopy. The structure is scanned such that an area of interest of the structure is scanned at a higher resolution than portions of the structure outside of the area of interest. An profile of the structure is then generated based on the scan. To correct skew and tilt of the profile, a first feature of the profile is aligned with a first axis of a coordinate system. The profile is then manipulated to align a second feature of the profile with a second axis of the coordinate system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.