Mass flow meter or controller with inclination sensor
US7409871B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 16, 2006 |
| Grant date | Aug 12, 2008 |
| Priority date | — |
| Expiry date | Oct 30, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F15/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A thermal mass flow meter associated with an inclination sensor that detects an angle of inclination of at least one portion of a thermal mass flow sensor relative to at least one reference axis. Based upon the detected angle of inclination, the output signal of the mass flow meter that is indicative of the mass flow rate of fluid through the sensor may be compensated to account for any inaccuracies relating to the orientation in which the mass flow meter is installed. Inaccuracies for which compensation may be provided include thermal siphoning effects and fluid buoyancy effects. By compensating for such inaccuracies, the mass flow meter may be used in any orientation, and/or may be used in non-inertial (e.g., accelerating) environments. The flow meter may be used as a stand alone device, or incorporated in a thermal mass flow controller.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.