Patent · US Expired

System and method for testing circuitry on a wafer

US7412639B2 · kind B2 · utility

20Cited by
23References
26Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 24, 2002
Grant dateAug 12, 2008
Priority date
Expiry dateFeb 15, 2025

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R31/318533
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A system and method in which a plurality of dice on a semiconductor wafer are interconnected to enable efficient testing thereof. In certain embodiments a plurality of dice are interconnected in a manner that enables test data to be communicated from a tester system to a plurality of dice for concurrent testing of such plurality of dice. Depending on the amount of interconnection, all or a portion of each of the plurality of dice may be tested concurrently. In certain embodiments, a plurality of dice are interconnected in a manner that enables test data to be communicated from one die to at least one other die. In certain embodiments, a plurality of dice are interconnected in a manner that enables such dice to be tested concurrently while maintaining a repeatable pattern at the reticle level for fabricating such dice.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.