Method and system for flow measurement and validation of a mass flow controller
US7412986B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 9, 2004 |
| Grant date | Aug 19, 2008 |
| Priority date | — |
| Expiry date | Jul 28, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7761
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methods for flow verification and validation of mass flow controllers are disclosed. A mass flow controller may be commanded to a specified flow and flow measurement commenced. Gas is accumulated in a first volume and while measurements are taken within this volume. Gas may then flow into a second volume while measurements are taken. The various measurements taken during the two intervals may then be used to calculate the flow rate. The flow rate, in turn, may be used to determine the accuracy of the mass flow controller relative to a setpoint. Additionally, these systems and methods may utilize only one volume to perform flow verification by flowing gas into this volume, taking measurements, and calculating the flow rate based only upon this set of measurements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.