Microsensor with ferroelectric material and method for fabricating the same
US7413912B2 · kind B2 · utility
7Cited by
12References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 11, 2005 |
| Grant date | Aug 19, 2008 |
| Priority date | — |
| Expiry date | Dec 31, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D86/85
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A microsensor fabricated with a ferroelectric material and a fabrication method therefor are provided. The microsensor includes a support, an insulating layer on the support, a first electrode on the insulating layer, a ferroelectric layer having at least a metal on the insulating layer and the first electrode, and at least a second electrode on the ferroelectric layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.