Buried-waveguide-type light receiving element and manufacturing method thereof
US7415185B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 9, 2007 |
| Grant date | Aug 19, 2008 |
| Priority date | — |
| Expiry date | Jul 9, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F77/14
Abstract
A buried-waveguide light detecting element includes an n-type cladding layer on a Fe-InP substrate, a waveguide on a portion of the n-type cladding layer, and in which an n-type light guide layer, an i-light guide layer having a refractive index equal to or higher than that of the n-type cladding layer and undoped or having an impurity concentration of 1×1017 cm−3 or less, lower than the impurity concentration in the n-type light guide layer, a light absorption layer having a refractive index higher than that of the i-light guide layer, a p-type light guide layer, and a p-type cladding layer are successively layered in mesa form, from the Fe—InP substrate, and a blocking layer on the Fe—InP substrate and in which side walls of the waveguide are embedded.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.