Thermally cured undercoat for lithographic application
US7416821B2 · kind B2 · utility
2Cited by
17References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 9, 2005 |
| Grant date | Aug 26, 2008 |
| Priority date | — |
| Expiry date | Nov 19, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/128
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
Thermally curable undercoat composition comprising for producing a bilayer relief image comprising:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.