Piezoelectric thin film device and method for manufacturing the same
US7420320B2 · kind B2 · utility
28Cited by
7References
7Claims
0Family size
Assignee
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Key dates
| Filing date | Nov 29, 2007 |
| Grant date | Sep 2, 2008 |
| Priority date | — |
| Expiry date | Nov 29, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49155
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A piezoelectric thin film device includes an amorphous metal film disposed on a substrate and a piezoelectric film disposed on the amorphous metal. One of crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous metal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.