Optical proximity correction in raster scan printing based on grayscale manipulation of the bitmap
US7420710B2 · kind B2 · utility
1Cited by
13References
18Claims
0Family size
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Key dates
| Filing date | Jun 16, 2004 |
| Grant date | Sep 2, 2008 |
| Priority date | — |
| Expiry date | Nov 11, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
Methods and apparatus for correcting defects, such as rounded corners and line end shortening, in patterns formed via photolithography are provided. Such defects are compensated for “post-rasterization” by manipulating the grayscale values of pixel maps.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.