Torsional nonresonant z-axis micromachined gyroscope with non-resonant actuation to measure the angular rotation of an object
US7421898B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 12, 2005 |
| Grant date | Sep 9, 2008 |
| Priority date | — |
| Expiry date | Oct 13, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A gimbal-type torsional z-axis micromachined gyroscope with a non-resonant actuation scheme measures angular rate of an object with respect to the axis normal to the substrate plane (the z-axis). A 2 degrees-of-freedom (2-DOF) drive-mode oscillator is comprised of a sensing plate suspended inside two gimbals. By utilizing dynamic amplification of torsional oscillations in the drive-mode instead of resonance, large oscillation amplitudes of the sensing element is achieved with small actuation amplitudes, providing improved linearity and stability despite parallel-plate actuation. The device operates at resonance in the sense direction for improved sensitivity, while the drive direction amplitude is inherently constant within the same frequency band.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.