Method and apparatus for controlling deformable actuators

US7424330B2 · kind B2 · utility

Assignees

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE
• Micronic Laser Systems AB · SE

Inventors

• Peter Duerr · Tokyo, JP
• Ulric Ljungblad · Mölndal, SE

Key dates

• Filing date: Jan 4, 2005
• Grant date: Sep 9, 2008
• Expiry date: Oct 23, 2026

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B26/0858
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

In order to prevent negative effects of imprinting an the addressing accuracy of deformable actuators, a method for controlling deformable actuators has, during an event period, driving the first and the second deformable actuator for causing the deformable actuators to assume a first and a second deformation state, respectively; and, before or after the event period, driving the first and the second deformable actuator for causing the deformable actuators to assume deformations states to counteract an imprinting caused during the event period by approximating the loads applied to the deformable actuators to each other. According to an embodiment, before or after the event period, for a period substantially as long as the operation period, the first and the second deformable actuator are driven such that the first deformable actuator assumes the second deformation state and the second deformable actuator assumes the first deformation state.