Method and system for flow measurement and validation of a mass flow controller
US7424895B2 · kind B2 · utility
9Cited by
43References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 21, 2004 |
| Grant date | Sep 16, 2008 |
| Priority date | — |
| Expiry date | May 19, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7761
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methods for flow verification and validation of mass flow controllers are disclosed. A mass flow controller may be commanded to a specified flow and flow measurement commenced. During an interval, gas is accumulated in a first volume and measurements taken within this volume. The various measurements taken during the interval may then be used to calculate the flow rate. The flow rate, in turn, may be used to determine the accuracy of the mass flow controller relative to a setpoint.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.