Patent · US Expired

Optical component that includes a material having a thermal longitudinal expansion with a zero crossing

US7428037B2 · kind B2 · utility

1Cited by

8References

28Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Timo Laufer · Stuttgart, DE
Jean-Noel Fehr
Harald Kirchner · Munich, DE
Andreas Ochse · Oberkochen, DE

Key dates

Filing date	Jan 24, 2005
Grant date	Sep 23, 2008
Priority date	—
Expiry date	Apr 28, 2026

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70891
WIPO fieldOptics
WIPO sectorInstruments

Abstract

There is provided an optical component. The optical component includes a material having a surface that heats to a maximum temperature (Tmax) when subjected to radiation. The material has a temperature-dependent coefficient of thermal expansion (α(T)) of about zero at a temperature T0 that is approximately equal to Tmax. The optical component is suitable for use in any of an illumination system, a projection objective or a projection exposure system, as employed, for example, for EUV microlithography.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.