Method of forming a three-dimensional image of a pattern to be inspected and apparatus for performing the same
US7428328B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 12, 2005 |
| Grant date | Sep 23, 2008 |
| Priority date | — |
| Expiry date | Mar 14, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K7/00
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
In a method and apparatus for forming a three-dimensional image for an inspection pattern, a reference intensity function of an inspection X-ray is formed in accordance with a continuous scanning depth, and is differentiated with respect to the scanning depth. The differential reference intensity function is decomposed into a start function and a characteristic function. The differential reference intensity function is then repeatedly integrated while a temporary vertical profile function is substituted for the start function until the temporary intensity of a reference X-ray is within an allowable error range. The temporary vertical profile function satisfying the error range is selected as an optimal vertical profile function. A surface shape is combined to the optimal vertical profile function along a depth of the inspection pattern to thereby form the three-dimensional image for the inspection pattern.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.