Patent · US Expired

Flow restrictor

US7431045B2 · kind B2 · utility

29Cited by
18References
3Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 24, 2005
Grant dateOct 7, 2008
Priority date
Expiry dateFeb 24, 2025

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T137/7761
  • WIPO fieldControl
  • WIPO sectorInstruments

Abstract

A flow restrictor with a first disk having at least one inlet and at least one outlet and a flow path and a second disk having no flow path. The first disk and the second disk being stacked together. A mass flow controller comprising with an input, an output, a flow path, a pressure transducer and the above flow restrictor.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.