Surface cleaning and sterilization
US7432470B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 17, 2006 |
| Grant date | Oct 7, 2008 |
| Priority date | — |
| Expiry date | Mar 17, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/461
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Methods and apparatus are provided for igniting, modulating, and sustaining a plasma for various plasma processes and treatments. Such treatments include cleaning and sterilizing parts. In some embodiments, a plasma is ignited by subjecting a gas in a multi-mode processing cavity to electromagnetic radiation having a frequency between about 1 MHz and about 333 GHz in the presence of a plasma catalyst. A part can be cleaned by, for example, inserting hydrogen into the plasma and exposing the part to the hydrogen-enriched plasma. A part can be sterilized by heating the part with the plasma.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.