Inventor · Rochester Hills, MI, US

Devendra Kumar

33Patents
13h-index
28Co-inventors
81Inventor score

Filing activity: Apr 11, 1984 → Sep 13, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US7498242B2 Plasma pre-treating surfaces for atomic layer deposition Electricity 526 Active
US6949456B2 Method for manufacturing semiconductor device having porous structure with air-gaps Electricity 69 Expired
US6307184A Thermal processing chamber for heating and cooling wafer-like objects Electricity 47 Expired
US7608798B2 Plasma catalyst Emerging Cross-Sectional Technologies 47 Active
US7132621B2 Plasma catalyst Emerging Cross-Sectional Technologies 39 Expired
US6881683B2 Insulation film on semiconductor substrate and method for forming same Electricity 35 Expired
US7445817B2 Plasma-assisted formation of carbon structures Electricity 30 Expired
US5135604A Analysis of radiofrequency discharges in plasma Physics 27 Expired
US6870124B2 Plasma-assisted joining Emerging Cross-Sectional Technologies 24 Expired
US7227097B2 Plasma generation and processing with multiple radiation sources Emerging Cross-Sectional Technologies 23 Expired
US4600769A Amine terminated bisaspartimide polymer Emerging Cross-Sectional Technologies 21 Expired
US7189940B2 Plasma-assisted melting Emerging Cross-Sectional Technologies 16 Expired
US7309843B2 Plasma-assisted joining Emerging Cross-Sectional Technologies 13 Expired
US6423947B1 Thermal processing chamber for heating and cooling wafer-like objects Electricity 13 Expired
US7497922B2 Plasma-assisted gas production Chemistry; Metallurgy 12 Expired
US4550177A Maleimido substituted aromatic cyclotriphosphazenes Emerging Cross-Sectional Technologies 12 Expired
US6454877B1 Laser phase transformation and ion implantation in metals Chemistry; Metallurgy 12 Expired
US7214280B2 Plasma-assisted decrystallization Emerging Cross-Sectional Technologies 12 Expired
US7671309B2 Microwave combustion system for internal combustion engines Electricity 9 Active
US7592564B2 Plasma generation and processing with multiple radiation sources Emerging Cross-Sectional Technologies 8 Active
US7498066B2 Plasma-assisted enhanced coating Electricity 7 Expired
US7432470B2 Surface cleaning and sterilization Electricity 5 Expired
US7638727B2 Plasma-assisted heat treatment Chemistry; Metallurgy 4 Expired
US6838115B2 Thermal processing system and methods for forming low-k dielectric films suitable for incorporation into microelectronic devices Electricity 4 Expired
US4634759A Fire and heat resistant laminating resins based on maleimido substituted aromatic cyclotriphosphazene polymer Emerging Cross-Sectional Technologies 4 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.