System and method for simultaneous 3D height measurements on multiple sides of an object
US7433058B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 12, 2004 |
| Grant date | Oct 7, 2008 |
| Priority date | — |
| Expiry date | Feb 17, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/2518
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An interferometric method for determining a height profile of regions of the surface area of an object or of several objects, wherein the regions are substantially in different planes, is presented. The optical path of at least one portion of intensity coming from one of the regions is modified while obtaining at least one image, wherein each image contains the portion of intensity and corresponds to an intensity pattern projected on the regions. An object phase associated with the regions is established using the obtained image(s) and a height profile of the regions is determined using the object phase and a reference phase. An optical assembly is used for directing along a common detection axis an intensity coming from said regions that would be otherwise out of sight.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.