Methods and apparatus for a MEMS gyro sensor
US7434464B2 · kind B2 · utility
8Cited by
7References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 29, 2006 |
| Grant date | Oct 14, 2008 |
| Priority date | — |
| Expiry date | Nov 24, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A gyro sensor configured to sense an angular rate about a rotational axis includes a drive mass configured to undergo oscillatory linear motion within a plane, and a sense mass configured to undergo an oscillatory motion out of the plane as a function of the angular rate. A link spring component connects the sense mass to the drive mass such that the sense mass is substantially decoupled from the drive mass with respect to the oscillatory linear motion of the drive mass, but is coupled to the drive mass with respect to the oscillatory motion out of the plane of the sense mass.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.